Syensqo has announced the selection of its Tecnoflon FFKM NFS perfluoroelastomer product line by Korean company Innores, a specialist in sealing solutions, for use in semiconductor manufacturing processes. This is the first commercial implementation of materials from this family, developed as perfluoroelastomers with high chemical and plasma resistance and enhanced thermal stability, manufactured without the use of fluorosurfactants belonging to the PFAS group of compounds. Innores is integrating these materials into sealing components such as O-rings, bonded seals, gate valves, chamber lids and vacuum pump components, supplying them to some of the world's largest semiconductor manufacturers. The cooperation between the two companies is set in the broader context of the industry's drive towards solutions that reduce environmental impact while maintaining performance parameters required in advanced microelectronics processes.
Scope of Tecnoflon FFKM NFS applications in the semiconductor industry
The Tecnoflon FFKM NFS material portfolio has been developed for operation in environments with high chemical aggressiveness and advanced plasma processes, typical of today's integrated circuit manufacturing technologies. Key requirements in this area include resistance to a wide spectrum of process media, dimensional and material stability at elevated temperatures and the reduction of contaminants that could affect the quality and yield of production lines. According to information provided by the companies, FFKM materials from this series combine high chemical and plasma resistance with very good thermal stability. At the same time, their manufacture is carried out without the use of fluorosurfactants classified as PFAS, which is part of the response to increasing regulatory requirements and expectations regarding environmental responsibility in supply chains.
Innores solutions based on Tecnoflon FFKM NFS cover a wide range of sealing components used in critical points of process equipment. O-rings and bonded seals operate in static and dynamic joints, where leakage must be limited under varying pressure and temperature conditions. Gate valves and chamber lids require sealing materials with high resistance to repeated operating cycles and exposure to plasma and aggressive process gases. Vacuum pump components, in turn, must ensure stable operating conditions in low-pressure environments while minimising emissions and particle contamination.
Syensqo perspective on cooperation with Innores
Syensqo emphasises the importance of the first commercial implementation of Tecnoflon FFKM NFS materials as a step in the further development of its offering for the semiconductor sector. Andrew Lau, Senior Executive Vice President of Electronics & Industrial at Syensqo Specialty Polymers, points out that the cooperation goes beyond the purely commercial aspect.
"This partnership is more than a commercial achievement, it is a reflection of Syensqo’s values and our commitment to making a positive impact through science and collaboration. Working closely with partners like Innores allows us to expand our reach in the global semiconductor market, supplying advanced materials to some of the industry’s most influential players," says Andrew Lau. "It also strengthens our reputation as a trusted partner for customers seeking both performance and sustainability in their supply chains."
The communication highlights that, through cooperation with partners such as Innores, Syensqo is expanding its presence in the global semiconductor market by supplying materials to key players in this sector. The company also points to the role of material solutions in combining requirements for reliability and performance with the growing focus on sustainable practices in supply chains.
Focus on environmental responsibility and process efficiency
The cooperation between Syensqo and Innores has been framed in the context of a shared vision of responsible manufacturing and environmental stewardship. As emphasised by Kyoung Il Kim, Chief Operating Officer at Innores, both companies focus on developing technological solutions that support more sustainable processes in the semiconductor industry.
"What makes this collaboration even more meaningful is our shared commitment to sustainability and responsible manufacturing. Innores’ ongoing efforts to improve energy efficiency, minimize waste, and expand emissions tracking are closely aligned with Syensqo’s mission to drive scientific breakthroughs that advance humanity," says Kyoung Il Kim. "Together, we are making tangible progress in supporting a greener, more responsible semiconductor industry."
The companies' communication underlines that Innores is consistently developing activities related to improving energy efficiency, minimising waste and expanding emissions monitoring systems. These are areas that Syensqo identifies as being aligned with its own mission of developing scientific innovations that support responsible technologies. The parties emphasise that the integration of Tecnoflon FFKM NFS materials into sealing components for semiconductor processes forms part of a broader approach to reducing environmental impact while maintaining high operating parameters of production installations.
The joint activities of Syensqo and Innores are part of a broader trend in the microelectronics industry, in which the development of polymer and elastomer materials is closely linked to requirements for process reliability and meeting environmental criteria. The selection of perfluoroelastomers with appropriately defined chemical and thermal properties is becoming one of the key elements in the design of modern sealing systems in semiconductor manufacturing installations.
